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Piezo Assist Motor

Piezo Assist Motor(PAM3-6.5 and PAM6-13)

  • Assist Motor is compact in size, and designed to have a high output force up to around 13N for PAM3-6.5 and around 29N for PAM6-13.
  • The output displacement is 6.5mm for PAM3-6.5 and 13mm for PAM6-13. The high displacement resolution is below 25nm~30nm while the travel velocity is above 1.5m/s.
  • The Piezo Assist Motor is designed user friendly for industrial, scientific research applications.
  • Applications include Microscope scanning, High resolution microscope, Biotechnology, Measurement technology, High speed throughput microscope, Mask/ Wafer positioning, Interferometer shape measurement and Micromanipulation.
  • Please use the designated Piezo Assist Motor Controller (PAMC-104)to drive the Piezo Assist Motor. A software and cable (2m) is attached to Piezo Assist Motor.

    Product                                                                                                                                                                                 Price [円]
    PAM3-6.5 Piezo Assist Motor,  Travel range 6.5mm,  Minimum Movement 30nm,  Mounting Part φ6 shank 88,000
    PAM6-13 Piezo Assist Motor,  Travel range 13mm,  Minimum Movement 25nm,   Mounting Part φ95 shank 77,000
    PAMC-104 Piezo Assist Motor Controller,  Driving Axis 4,  RS232C Interface 88,000
    PAMC-100 Piezo Assist Motor Controller(remote control) 44,000
    PAMC4-485 Piezo Assist Motor Controller,  Driving Axis 4,  RS485 Interface 88,000

Piezo Assist Motor Operating Principal

Piezo assist motor rotates based on the inertial rotation mechanism inside the housing. This generates thrust and displacement in the direction of the screw shaft. As shown in Fig. 2, the
inertial rotation mechanism principal diagram, the screw shaft work as a rotor. The screw shaft is connected to the moment of inertia (rotary knob, etc.). The screw shaft is hold by the
contactor with stat-ic friction force. Therefore, no power consumption is needed to maintain the po-sition. When the piezoelectric actuator extends as shown in Fig. 2, contacts A and B
move at an opposite direction to each other. An acceleration at contact A and B is created intentionally. The acceleration will take over the static fric-tion and generate a slippage betwe-
en rotor and contact. The slippage resulted a rotational motion of the screw shaft. As a result, the screw shaft is moved in a thrust direction.

Dimension(Unit:mm)

PAM3-6.5



















PAM6-13









Dedicated cable(2m)

Specifications

prices in the table are tax included for Japan domestic customers. For overseas (non-Japan) customers, 10% sales tax will be deducted from the price stated.

Product Name PAM3-6.5 PAM6-13
Minimum Movement (nm) Below 30 Below 25
Maximum Load Capacity (N) Above 13 Above 29.4
Maximum Drive Frequency (Hz) 2000 2000
Moving Speed (mm/min) 1.5 1.5
Travel range (mm) Above 6.5(Maximum 9) Above 13(Maximum18)
Mounting Part (mm) φ6 shank M9x0.5 screw
Dimension (mm) 41x21.6x8.2 61x31x15.1
Operating Temperature 0~40℃ 0~40℃
Storage Temperature 0~40℃ 0~40℃
Ambient Humidity 10~80%RH(No condensation) 10~80%RH(No condensation)
Connector SMB connector SMB connector
Lifespan Above 1x109 pulse Above 1x109 pulse
Weight (kg) 0.02 0.05
Price ¥88,000 ¥77,000

Application

(Application example of PAM6-13)To be attached to Piezo Assist Stage(Table Size 40x40mm, Table Size 60x60mm).

  • Microscope scanning
  • High resolution microscope
  • Biotechnology
  • Measurement technology
  • High speed throughput microscope
  • Mask/ Wafer positioning
  • Interferometer shape measurement
  • Micromanipulation






Piezo Assist Motor Operation Example

         Fig.1 and Fig.2 show the displacement vs characteristics of the Piezo Assist Motor driven at 40 pulses with drive frequencies of 1Hz and 5Hz. Fig.1 shows the data during forward
         rotation, and Fig.2 shows data during reverse rotation

  • At 1Hz, the displacement is stepped at 10~16nm/pulse, and the displacement is smooth at 5Hz.
  • The displacement for 40pulses is 480nm (average 12nm/pulse) in forward rotation for both 1Hz and 5Hz. They are 520nm(average 13nm/pulse) in reverse rotation.

Precautions

  • Set an appropriate load (more than 3N is recommended) to improve the followability of the actuator body.
  • Please note that the speed and minimum movement varies depending on individual differences and the feed direction of the actuator.
  • It is possible to attach this product to your specified manual stage. Please contact us and let us know accordingly. We will try our best to meet your needs.
    However please be noted that depending on the specifications, additional machining or modification may be required.
  • Please use specified Piezo Assist Motor Controller(PAMC-104)for this product.

Piezo Assist Motor Controller(PAMC-104/PAMC4-485)

  • Piezo Assist Motor Controller is a designated controller to drive Piezo Assist Motor.
  • PAMC-104 operate the Piezo Assist Motor remotely with PC through RS-232C. By connecting the controller to PAM-RC100, the Piezo Assist Motor can be operated manually.
  • Please only use the attached cable for driving the Piezo Assist Motor.

Dimension(Unit:mm)

PAMC-104

PAMC4-485

piezo assiat

PAM-RC100(option)

Piezo Assist Motor Controller

仕様

Specifications PAMC-104
Number of Driving Axis 4
Maximum Driving Frequency (kHz) 2
Interface RS-232C
Switchable channel number 4
Power Supply Voltage (V) DC24
Current consumption (A)
Dimension(mm)
(excluding protrusions)
200x162x50
Operating Temperature 0~40℃
Storage Temperature 0~40℃
Ambient Humidity 10~80%RH(No condensation)
Weight (kg) 1.2
Price ¥88,000

prices in the table are tax included for Japan domestic customers. For overseas (non-Japan) customers, 10% sales tax will be deducted from the price stated.

 

Specifications PAMC4-485
Number of Driving Axis 4
Maximum Driving Frequency (kHz) 2
Interface RS485
Switchable channel number 4
Power Supply Voltage (V) DC24
Current consumption (A)
Dimension(mm)
(excluding protrusions)
200x162x50
Operating Temperature 0~40℃
Storage Temperature 0~40℃
Ambient Humidity 10~80%RH(No condensation)
Weight (kg) 1.2
Price ¥88,000

prices in the table are tax included for Japan domestic customers. For overseas (non-Japan) customers, 10% sales tax will be deducted from the price stated.

 

Product Name PAM-RC100
Driving Frequency (Hz) 0~2000
Switchable channel number 4
Interface RS-232C
Dimension (mm)
(excluding protrusions)
102x78x30
Operating Temperature 0~40℃
Storage Temperature 0~40℃
Ambient Humidity 10~80%RH(No condensation)
Weight (kg) 0.32
Price ¥44,000

prices in the table are tax included for Japan domestic customers. For overseas (non-Japan) customers, 10% sales tax will be deducted from the price stated.

Precautions

  1. The power supply specification for this product is DC+24V2A.
  2. Please do not connect to other products besides Piezo Assist Motor.
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