Piezo Assist Motor *
Piezo Assist Motor（PAM3-6.5 and PAM6-13）
- Assist Motor is compact in size, and designed to have a high output force up to around 13N for PAM3-6.5 and around 29N for PAM6-13.
- The output displacement is 6.5mm for PAM3-6.5 and 13mm for PAM6-13. The high displacement resolution is below 25nm～30nm while the travel velocity is above 1.5m/s.
- The Piezo Assist Motor is designed user friendly for industrial, scientific research applications.
- Applications include Microscope scanning, High resolution microscope, Biotechnology, Measurement technology, High speed throughput microscope, Mask/ Wafer positioning, Interferometer shape measurement and Micromanipulation.
- Please use the designated Piezo Assist Motor Controller (PAMC-104）to drive the Piezo Assist Motor. A software and cable (2m) is attached to Piezo Assist Motor.
* “Piezo Assist” and “PiezoAssist” are registered trademarks of Mechano Transformer Corporation.
Driving example （reference）
PAM3-6.5 (weight 1.5kg played at about 100x speed)
PAM6-13 (Weight 3kg played at about 1,000x speed)
- Microscope scanning
- High resolution microscope
- Biotechnology
- Measurement technology
- High speed throughput microscope
- Mask/ Wafer positioning
- Interferometer shape measurement
- Micromanipulation
- At 1Hz, the displacement is stepped at 10～16nm/pulse, and the displacement is smooth at ５Hz.
- The displacement for 40pulses is 480nm (average 12nm/pulse) in forward rotation for both 1Hz and 5Hz. They are 520nm（average 13nm/pulse） in reverse rotation.
- Ultra-fine resolution in Nanometer
- Holds position even when power is not supplied
- Movable angle range is ±3.5°（≒ ± 61mrad )
- 1.6 μrad Ultra-precise adjustment by ( Over 70,000 steps)
- Set an appropriate load (more than 3N is recommended) to improve the followability of the actuator body.
- Please note that the speed and minimum movement varies depending on individual differences and the feed direction of the actuator.
- It is possible to attach this product to your specified manual stage. Please contact us and let us know accordingly. We will try our best to meet your needs.
However please be noted that depending on the specifications, additional machining or modification may be required. - Please use specified Piezo Assist Motor Controller（PAMC-104）for this product.
- Piezo Assist Motor Controller is a designated controller to drive Piezo Assist Motor.
- PAMC-104 operate the Piezo Assist Motor remotely with PC through RS-232C. By connecting the controller to PAM-RC100, the Piezo Assist Motor can be operated manually.
- Please only use the attached cable for driving the Piezo Assist Motor.
- The power supply specification for this product is DC＋24V2A.
- Please do not connect to other products besides Piezo Assist Motor.
- higher resolution to below 30 nanometers
- After positioning, the intended position can be maintained without power supply
- from manual stage adjustment to electrical controlled precision stages
- Easily realize the automation of your equipment
- Easily achieves nanometer order precision of your equipment
- Maintain at adjusted position even without power supply
- Easily replaceable with micrometer head
- Easily visualize the amount of movement by attaching an external sensor
| Product | Price [円] | |
|---|---|---|
| PAM3-6.5 | Piezo Assist Motor, Travel range 6.5mm, Minimum Movement 30nm, Mounting Part φ6 shank | 88,000 |
| PAM6-13 | Piezo Assist Motor, Travel range 13mm, Minimum Movement 25nm, Mounting Part φ95 shank | 77,000 |
| PAMC-104 | Piezo Assist Motor Controller, Driving Axis 4, RS232C Interface | 132,000 |
| PAMC-100 | Piezo Assist Motor Controller（remote control） | 55,000 |
| PAMC4-485 | Piezo Assist Motor Controller, Driving Axis 4, RS485 Interface | 132,000 |
| Tip shape | Travel range | Shank diameter | Anodization process | Controller | Drawing Plan (PDF) | Drawing Plan (.setp) | |
|---|---|---|---|---|---|---|---|
| PAM6-13 | Flat | ±6.5mm | φ9.5 (M9.5 x 0.5) | Yes | PAMC-104/ 485 | A111 | link |
| PAM6-13R | R Type | ±6.5mm | φ9.5 (M9.5 x 0.5) | Yes | PAMC-104/ 485 | A112 | link |
| PAM6-13R-C | R Type | ±3mm | φ9.5 (M9.5 x 0.5) | Yes | PAMC-104/ 485 | A110 | link |
| PAM6-13R-C1 | R Type | ±4mm | φ9.5 | Yes | PAMC-104/ 485 | A113 | link |
| Tip shape | Travel range | Shank diameter | Anodization process | Controller | Drawing Plan (PDF) | Drawing Plan (.setp) | |
|---|---|---|---|---|---|---|---|
| PAM6-13N | Flat | ±6.5mm | φ9.5 (M9.5 x 0.5) | No | PAMC-104/ 485 | A111 | link |
| PAM6-13RN | R Type | ±6.5mm | φ9.5 (M9.5 x 0.5) | No | PAMC-104/ 485 | A112 | link |
| PAM6-13R-CN | R Type | ±3mm | φ9.5 (M9.5 x 0.5) | No | PAMC-104/ 485 | A110 | link |
| PAM6-13R-C1 | R Type | ±4mm | φ9.5 | No | PAMC-104/ 485 | A113 | link |
| Tip shape | Travel range | Shank diameter | Anodization process | Controller | Drawing Plan (PDF) | Drawing Plan (.setp) | |
|---|---|---|---|---|---|---|---|
| PAM3-6.5 | Flat | ±3mm | φ6 | Yes | PAMC-104/ 485 | A105 | link |
| PAM3-6.5R | R Type | ±3mm | φ6 | Yes | PAMC-104/ 485 | A104 | link |
| PAM3-6.5R-C1 | R Type | ±（3mm±0.2） | φ5 | Yes | PAMC-104/ 485 | A106 | link |
| Tip shape | Travel range | Shank diameter | Anodization process | Controller | Drawing Plan (PDF) | Drawing Plan (.setp) | |
|---|---|---|---|---|---|---|---|
| PAM3-6.5N | Flat | ±3mm | φ6 | No | PAMC-104/ 485 | A105 | link |
| PAM3-6.5RN | R Type | ±3mm | φ6 | No | PAMC-104/ 485 | A104 | link |
| PAM3-6.5R-C1N | R Type | ±（3mm±0.2） | φ5 | No | PAMC-104/ 485 | A106 | link |
# PAM's product code:
Piezo Assist Motor Operating Principal
Piezo assist motor rotates based on the inertial rotation mechanism inside the housing. This generates thrust and displacement in the direction of the screw shaft. As shown in Fig. 2, the inertial rotation mechanism principal diagram, the screw shaft work as a rotor. The screw shaft is connected to the moment of inertia (rotary knob, etc.). The screw shaft is hold by the contactor with stat-ic friction force. Therefore, no power consumption is needed to maintain the po-sition. When the piezoelectric actuator extends as shown in Fig. 2, contacts A and B move at an opposite direction to each other. An acceleration at contact A and B is created intentionally. The acceleration will take over the static fric-tion and generate a slippage between rotor and contact. The slippage resulted a rotational motion of the screw shaft. As a result, the screw shaft is moved in a thrust direction.
Piezo Assist Motor Catalogue >> Link
Dimension（Unit：mm）
PAM3-6.5
PAM6-13
Dedicated cable（2m）
Specifications
prices in the table are tax included for Japan domestic customers. For overseas (non-Japan) customers, 10% sales tax will be deducted from the price stated.
| Product Name | PAM3-6.5 | PAM6-13 |
|---|---|---|
| Minimum Movement (nm) | Below 30 | Below 25 |
| Maximum Load Capacity (N) | Above 13 | Above 29.4 |
| Maximum Drive Frequency (Hz) | 2000 | 2000 |
| Moving Speed (mm/min) | 1.5 | 1.5 |
| Travel range (mm) | Above 6.5（Maximum ９） | Above 13（Maximum18） |
| Mounting Part (mm) | φ6 shank | M9x0.5 screw |
| Dimension (mm) | 41x21.6x8.2 | 61x31x15.1 |
| Operating Temperature | 0～40℃ | 0～40℃ |
| Storage Temperature | 0～40℃ | 0～40℃ |
| Ambient Humidity | 10～80％RH（No condensation） | 10～80％RH（No condensation） |
| Connector | SMB connector | SMB connector |
| Lifespan | Above 1x109 pulse | Above 1x109 pulse |
| Weight (kg) | 0.02 | 0.05 |
| Price | ￥88,000 | ￥77,000 |
| User manual | Download | Download |
Application
（Application example of PAM6-13）To be attached to Piezo Assist Stage（Table Size 40x40mm, Table Size 60x60mm）.
Piezo Assist Motor Operation Example
Fig.1 and Fig.2 show the displacement vs characteristics of the Piezo Assist Motor driven at 40 pulses with
drive frequencies of 1Hz and 5Hz. Fig.1 shows the data during forward
rotation, and Fig.2 shows data during
reverse rotation
Application example of Piezo Assist Mirror (Angle Adjustment of Mirror Holder )
Driving test video (reference)
Precautions
Piezo Assist Motor Controller（PAMC-104/PAMC4-485）
Dimension（Unit：mm）
PAMC-104
PAMC4-485
PAM-RC100（option）
仕様
| Specifications | PAMC-104 |
|---|---|
| Number of Driving Axis | 4 |
| Maximum Driving Frequency (Hz) | 1500 |
| Interface | RS-232C |
| Switchable channel number | 4 |
| Power Supply Voltage (V) | DC24 |
| Current consumption (A) | ― |
| Dimension(mm) (excluding protrusions) |
200x162x50 |
| Operating Temperature | 0～40℃ |
| Storage Temperature | 0～40℃ |
| Ambient Humidity | 10～80％RH（No condensation） |
| Weight (kg) | 1.2 |
| Price | ￥132,000 |
| User manual | Download |
prices in the table are tax included for Japan domestic customers. For overseas (non-Japan) customers, 10% sales tax will be deducted from the price stated.
| Specifications | PAMC4-485 |
|---|---|
| Number of Driving Axis | 4 |
| Maximum Driving Frequency (Hz) | 1500 |
| Interface | RS485 |
| Switchable channel number | 4 |
| Power Supply Voltage (V) | DC24 |
| Current consumption (A) | ― |
| Dimension(mm) (excluding protrusions) |
200x162x50 |
| Operating Temperature | 0～40℃ |
| Storage Temperature | 0～40℃ |
| Ambient Humidity | 10～80％RH（No condensation） |
| Weight (kg) | 1.2 |
| Price | ￥132,000 |
| User manual | Download |
prices in the table are tax included for Japan domestic customers. For overseas (non-Japan) customers, 10% sales tax will be deducted from the price stated.
| Product Name | PAM-RC100 |
|---|---|
| Maximum Driving Frequency (Hz) | 1500 |
| Switchable channel number | 4 |
| Interface | RS-232C |
| Dimension (mm) (excluding protrusions) |
102x78x30 |
| Operating Temperature | 0～40℃ |
| Storage Temperature | 0～40℃ |
| Ambient Humidity | 10～80％RH（No condensation） |
| Weight (kg) | 0.32 |
| Price | ￥55,000 |
| User manual | Download |
prices in the table are tax included for Japan domestic customers. For overseas (non-Japan) customers, 10% sales tax will be deducted from the price stated.
Precautions
Piezo Assist MotorⓇ Nanometer level alignment
Make your manual stage to nanometer positioning stage
Details:
By just replace the micrometer head with the Piezo Assist MotorⓇ, the manual stage is transform to:
The merits of using Piezo Assist MotorⓇ
⇒Turn your manual stage to nanometer order positioning stage and electrically controlled precision stage
Piezo Assist MotorⓇ is a piezoelectric driven actuator with a resolution of less than 30 nanometers. Manual stage can be transformed into nanometer order positioning stage and electrically controlled precision stage.
Example
１． Transform your manual stage to precision stage
3-axis manual stage equipped with Piezo Assist MotorⓇ
Example：Micromanipulator、Scanning microscope、High resolution microscope etc.
２．Mirror Mount
2-axis mirror mounter with Piezo Assist MotorⓇ
Examples: Interferometer construction, Laser irradiation positioning, Laser welding etc.
Some examples applications
Operating precautions：
1. A high voltage is applied to the Piezo Assist MotorⓇ during operation. Use only specified controllers such as PAMC-104 or PAMC4-485 to drive the motor.
2. If you need to disconnect or plug in the cable from the Piezo Assist MotorⓇ or controller, turn off the power to the controller before doing so.
3. Do not disassemble or modify the piezo assist motor or controller PAMC-104 or PAMC4-485.
4. Do not use the motor near flammable materials or damp or humid areas.
5. If a strange odor, noise, overheating, or heat radiation is detected, please turn off the controller and check the situation.
6. Do not turn on the driver after dropping the controller or subjecting it to impact.
7. Do not touch the PAM during operation, as high voltages are applied during operation.
8. If the Piezo Assist MotorⓇ moves to the threaded end, you can manually adjust the position by turning the adjustment knob.
9. Piezo Assist MotorⓇ is an open loop device. If absolute position is required, a seperate external sensor must be provided, and a closed loop must be configured.
10. During operation, the Piezo Assist MotorⓇ produces high pitch noise.
11. You can prevent grease from sticking by moving the knob from one end to the other to redistribute the grease from time to time. If the motor is not used for a long time, the grease may become hard. In that case, you may be able to fix it by manually turning the knob from one end to the other.