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PIEZO ASSIST MOTOR
What is a Piezo Assist Motor?
Models and prices
Specifications and dimensions
PAM attached stages
PAM attached mirror mounters
Applications
Installation and precautions
Controllers
Nanometre level alignment
Downloads
What is a Piezo Assist Motor?
PAM3-6.5 and PAM6-13
- The Piezo Assist Motor is compact and delivers a high output force of around 13 N for the PAM3-6.5 and around 29 N for the PAM6-13.
- Travel is 6.5 mm for the PAM3-6.5 and 13 mm for the PAM6-13, with a resolution of 30 nm and 25 nm or better and a speed above 1.5 mm/min.
- It is designed to be straightforward to use in industrial and scientific research settings.
- Typical applications include microscope scanning, high resolution microscopy, biotechnology, measurement, high throughput microscopy, mask and wafer positioning, interferometric shape measurement and micromanipulation.
- Drive the motor with the dedicated Piezo Assist Motor Controller, PAMC-104 or PAMC-204. Software and a 2 m cable are supplied with the motor.
Piezo Assist and PiezoAssist are registered trademarks of Mechano Transformer Corporation.
Models and prices
| Product | Description | Price (yen) |
|---|---|---|
| PAM3-6.5 | Piezo Assist Motor, travel range 6.5 mm, minimum movement 30 nm, φ6 shank mounting | 88,000 |
| PAM6-13 | Piezo Assist Motor, travel range 13 mm, minimum movement 25 nm, φ9.5 shank mounting | 77,000 |
| PAMC-104 | Piezo Assist Motor Controller, 4 axes, RS232C interface | 132,000 |
| PAM-RC100 | Piezo Assist Motor Controller, remote control | 55,000 |
| PAMC-204 | Piezo Assist Motor Controller, 4 axes, RS485 and USB interface | 176,000 |
PAM6-13 series, anodized
| Model | Tip shape | Travel range | Shank diameter | Anodized | Controller | Drawing (PDF) | Drawing (STEP) |
|---|---|---|---|---|---|---|---|
| PAM6-13 | Flat | ±6.5 mm | φ9.5 (M9.5 x 0.5) | Yes | PAMC-104 / PAMC-204 | A111 | STEP → |
| PAM6-13R | R type | ±6.5 mm | φ9.5 (M9.5 x 0.5) | Yes | PAMC-104 / PAMC-204 | A112 | STEP → |
| PAM6-13R-C | R type | ±3 mm | φ9.5 (M9.5 x 0.5) | Yes | PAMC-104 / PAMC-204 | A110 | STEP → |
| PAM6-13R-C2 | R type | ±4 mm | φ9.5 (M9.5 x 0.5) | Yes | PAMC-104 / PAMC-204 | A114 | STEP → |
| PAM6-13R-C3 | R type | ±6.5 mm | φ9.5 (M9.5 x 0.5) | Yes | PAMC-104 / PAMC-204 | A115 | STEP → |
PAM6-13 series, not anodized
| Model | Tip shape | Travel range | Shank diameter | Anodized | Controller | Drawing (PDF) | Drawing (STEP) |
|---|---|---|---|---|---|---|---|
| PAM6-13N | Flat | ±6.5 mm | φ9.5 (M9.5 x 0.5) | No | PAMC-104 / PAMC-204 | A111 | STEP → |
| PAM6-13RN | R type | ±6.5 mm | φ9.5 (M9.5 x 0.5) | No | PAMC-104 / PAMC-204 | A112 | STEP → |
| PAM6-13R-CN | R type | ±3 mm | φ9.5 (M9.5 x 0.5) | No | PAMC-104 / PAMC-204 | A110 | STEP → |
| PAM6-13R-C2N | R type | ±4 mm | φ9.5 (M9.5 x 0.5) | No | PAMC-104 / PAMC-204 | A114 | STEP → |
| PAM6-13R-C3N | R type | ±6.5 mm | φ9.5 (M9.5 x 0.5) | No | PAMC-104 / PAMC-204 | A115 | STEP → |
PAM3-6.5 series, anodized
PAM3-6.5 series, not anodized
How the product code is built up
Specifications and dimensions
Operating principle
The motor turns using an inertial rotation mechanism housed inside the body, which produces thrust and displacement along the screw shaft. The screw shaft acts as the rotor and is connected to a moment of inertia such as a rotary knob. Static friction at the contactor holds the shaft, so no power is needed to maintain position.
When the piezoelectric actuator extends, contacts A and B move in opposite directions. The resulting acceleration overcomes the static friction and creates a controlled slip between rotor and contact, which turns the screw shaft and moves it in the thrust direction.
Piezo Assist Motor catalogue →
| Specification | PAM6-13 | PAM6-13R | PAM6-13R-C | PAM6-13R-C2 | PAM6-13N | PAM6-13RN | PAM6-13R-CN | PAM6-13R-C1N | PAM3-6.5 | PAM3-6.5R | PAM3-6.5R-C1 | PAM3-6.5N | PAM3-6 | PAM3-6.5R-C1N |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Minimum movement (nm) | 25 or less | 25 or less | 25 or less | 25 or less | 25 or less | 25 or less | 25 or less | 25 or less | 30 or less | 30 or less | 30 or less | 30 or less | 30 or less | 30 or less |
| Maximum load capacity (N) | 29.4 or more | 29.4 or more | 29.4 or more | 29.4 or more | 29.4 or more | 29.4 or more | 29.4 or more | 29.4 or more | 13 or more | 13 or more | 13 or more | 13 or more | 13 or more | 13 or more |
| Maximum drive frequency (kHz) | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 |
| Maximum speed (mm/min) | 1.5 or more | 1.5 or more | 1.5 or more | 1.5 or more | 1.5 or more | 1.5 or more | 1.5 or more | 1.5 or more | 1.5 or more | 1.5 or more | 1.5 or more | 1.5 or more | 1.5 or more | 1.5 or more |
| Travel range (mm) | 13 or more (max. 18) | 13 or more (max. 18) | 5 or more (max. 7) | 6 or more (max. 8) | 13 or more (max. 18) | 13 or more (max. 18) | 5 or more (max. 7) | 6 or more (max. 8) | 6.5 or more (max. 9) | 6.5 or more (max. 9) | 4 or more (max. 6) | 6.5 or more (max. 9) | 6.5 or more (max. 9) | 4 or more (max. 6) |
| Mounting | M9.5 x 0.5 screw | M9.5 x 0.5 screw | M9.5 x 0.5 screw | φ9.5 shank | M9.5 x 0.5 screw | M9.5 x 0.5 screw | M9.5 x 0.5 screw | φ9.5 shank | φ6 shank | φ6 shank | φ5 shank | φ6 shank | φ6 shank | φ5 shank |
| Dimensions (mm) | 61 x 32 x 15.1 | 63 x 32 x 15.1 | 52.5 x 32 x 15.1 | 47.5 x 32 x 15.1 | 61 x 32 x 15.1 | 63 x 32 x 15.1 | 52.5 x 32 x 15.1 | 47.5 x 32 x 15.1 | 41 x 21.6 x 8.2 | 43 x 21.6 x 8.2 | 37.2 x 21.6 x 7.2 | 41 x 21.6 x 8.2 | 43 x 21.6 x 8.2 | 37.2 x 21.6 x 7.2 |
| Operating temperature | 10 to 40 ℃ | 10 to 40 ℃ | 10 to 40 ℃ | 10 to 40 ℃ | 10 to 40 ℃ | 10 to 40 ℃ | 10 to 40 ℃ | 10 to 40 ℃ | 10 to 40 ℃ | 10 to 40 ℃ | 10 to 40 ℃ | 10 to 40 ℃ | 10 to 40 ℃ | 10 to 40 ℃ |
| Storage temperature | 5 to 40 ℃ | 5 to 40 ℃ | 5 to 40 ℃ | 5 to 40 ℃ | 5 to 40 ℃ | 5 to 40 ℃ | 5 to 40 ℃ | 5 to 40 ℃ | 5 to 40 ℃ | 5 to 40 ℃ | 5 to 40 ℃ | 5 to 40 ℃ | 5 to 40 ℃ | 5 to 40 ℃ |
| Ambient humidity | 10 to 80 %RH, no condensation | 10 to 80 %RH, no condensation | 10 to 80 %RH, no condensation | 10 to 80 %RH, no condensation | 10 to 80 %RH, no condensation | 10 to 80 %RH, no condensation | 10 to 80 %RH, no condensation | 10 to 80 %RH, no condensation | 10 to 80 %RH, no condensation | 10 to 80 %RH, no condensation | 10 to 80 %RH, no condensation | 10 to 80 %RH, no condensation | 10 to 80 %RH, no condensation | 10 to 80 %RH, no condensation |
| Connector | SMB | SMB | SMB | SMB | SMB | SMB | SMB | SMB | SMB | SMB | SMB | SMB | SMB | SMB |
| Service life | over 1 billion cycles | over 1 billion cycles | over 1 billion cycles | over 1 billion cycles | over 1 billion cycles | over 1 billion cycles | over 1 billion cycles | over 1 billion cycles | over 1 billion cycles | over 1 billion cycles | over 1 billion cycles | over 1 billion cycles | over 1 billion cycles | over 1 billion cycles |
| Mass (kg) | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 | 0.02 | 0.02 | 0.02 | 0.02 | 0.02 | 0.02 |
| Price (yen) | 77,000 | 77,000 | 77,000 | 77,000 | 77,000 | 77,000 | 77,000 | 77,000 | 88,000 | 88,000 | 88,000 | 88,000 | 88,000 | 88,000 |
| User manual | Download | Download | Download | Download | Download | Download | Download | Download | Download | Download | Download | Download | Download | Download |
Outline drawings (mm)
PAM3-6.5
PAM6-13
Dedicated cable (2 m)
PAM attached stages
MTPAM-TSD-402SR
The Nano Alignment Stage series is built to help you assemble an optical experiment quickly. The MTPAM-TSD-402SR is an electrically driven XY stage, well suited to positioning a load of 20 kgf with a resolution below 30 nm, typically in setups based on a Michelson interferometer.
| Stage size | 40 x 40 mm |
| Piezo resolution | below 20 nm |
| Moment stiffness, pitch | 0.5″/N·cm |
| Moment stiffness, yaw | 0.46″/N·cm |
| Moment stiffness, roll | 0.5″/N·cm |
| Guide method | Extended contact ball bearing guide |
| Travel accuracy, pitch | 25″ |
| Travel accuracy, yaw | 15″ |
| Travel accuracy, straightness | 0.5 µm |
| Running parallelism | 12 µm |
| Travel | ±6.5 mm |
| Actuator lead | 0.25 mm |
| Max. moment capacity, pitch | 7.8 N·m |
| Max. moment capacity, yaw | 5.0 N·m |
| Max. moment capacity, roll | 7.8 N·m |
| Weight | 0.41 kg |
| Primary material | Steel |
| Finish | Super black chrome and blue anodized |
| Parallelism | 30 µm |
| Orthogonality | 10 µm |
The series is driven by the Piezo Assist Motor, which makes nanometre order alignment straightforward. The stage can be controlled electrically or adjusted by hand, and its backlash is smaller than that of a common manual stage.
MTPAM-TSD-602SR
The MTPAM-TSD-602SR is an electrically driven XY stage, well suited to positioning a load of 35 kgf with a resolution below 30 nm.
| Stage size | 60 x 60 mm |
| Piezo resolution | below 20 nm |
| Moment stiffness, pitch | 0.31″/N·cm |
| Moment stiffness, yaw | 0.16″/N·cm |
| Moment stiffness, roll | 0.13″/N·cm |
| Guide method | Extended contact ball bearing guide |
| Travel accuracy, pitch | 25″ |
| Travel accuracy, yaw | 15″ |
| Travel accuracy, straightness | 0.5 µm |
| Running parallelism | 12 µm |
| Travel | ±6.5 mm |
| Actuator lead | 0.25 mm |
| Max. moment capacity, pitch | 13.2 N·m |
| Max. moment capacity, yaw | 10 N·m |
| Max. moment capacity, roll | 13.2 N·m |
| Weight | 0.91 kg |
| Primary material | Steel |
| Finish | Super black chrome and blue anodized |
| Parallelism | 30 µm |
| Orthogonality | 10 µm |
MTPAM-TSD-603
The MTPAM-TSD-603 is an electrically driven Z axis stage, well suited to positioning a load of 15 kgf with a resolution below 30 nm.
| Stage size | 60 x 60 mm |
| Piezo resolution | 20 nm |
| Moment stiffness, pitch | 0.41″/N·cm |
| Moment stiffness, roll | 0.41″/N·cm |
| Guide method | Extended contact ball bearing guide |
| Travel accuracy, straightness | 2.5 µm |
| Running parallelism | 20 µm |
| Travel | ±5 mm |
| Actuator lead | 0.25 mm |
| Max. moment capacity, pitch | 6.9 N·m |
| Max. moment capacity, roll | 6.9 N·m |
| Weight | 0.81 kg |
| Primary material | Steel |
| Finish | Black matte and blue anodized |
| Parallelism | 80 µm |
PAM attached mirror mounters
MTPAM-LMHB-30M
The Nano Alignment Mirror Mounter series is built to help you assemble an optical experiment quickly. The MTPAM-LMHB-30M is a two axis electrically driven mirror mounter, suited to building optical cavities and similar setups. It corrects misalignment of less than 1.0 mrad, the kind that often appears in interferometer based systems such as gravitational wave detectors.
| Type | Kinematic |
| Adjustment range, tilt | ±2.8° |
| Adjustment range, rotation | ±2.8° |
| Resolution, tilt | 0.7 µrad per rotation |
| Resolution, rotation | 0.7 µrad per rotation |
| Weight | 0.4 kg |
| Primary material | Aluminium |
| Compatible optics diameter | φ30 mm |
| Compatible optics thickness | 3 to 9 mm |
| Finish | Black anodized and blue anodized |
Driven by the Piezo Assist Motor, the mounter reaches microradian order alignment under electrical control, with less backlash than a common manual mounter. You can also automate the alignment with a neural network or another algorithm.
MTPAM-MHG-MP30-NL
The MTPAM-MHG-MP30-NL is a two axis electrically driven mirror mounter for optical cavities and similar setups, correcting misalignment of less than 1.0 mrad.
With this mounter you can build a self aligning optical system and automate the alignment procedure in software. One conventional way to detect misalignment is the wave front sensor method, which controls the attitude of the mirror by detecting interference between the 00 and 10 Hermite Gaussian modes.
| Primary material | Aluminium |
| Adjustment range, tilt | ±3° |
| Adjustment range, rotation | ±3° |
| Resolution, tilt | 0.7 µrad per rotation |
| Resolution, rotation | 0.7 µrad per rotation |
| Weight | 0.17 kg |
| Number of adjustment axes | 2 |
| Compatible optics diameter | φ30 mm |
| Compatible optics thickness | 3 to 5 mm |
| Finish | Black anodized and blue anodized |
| 2D drawing | Download |
| Solid model | Download STEP |
Applications
The PAM6-13 can be fitted to a Piezo Assist Stage with a 40 x 40 mm or 60 x 60 mm table.
- Microscope scanning
- High resolution microscopy
- Biotechnology
- Measurement technology
- High throughput microscopy
- Mask and wafer positioning
- Interferometric shape measurement
- Micromanipulation
Measured operation
The graphs show displacement against pulse count for 40 pulses at drive frequencies of 1 Hz and 5 Hz. Figure 1 covers forward rotation and figure 2 reverse rotation.
- At 1 Hz the movement is stepped at 10 to 16 nm per pulse; at 5 Hz it is smooth.
- Over 40 pulses the displacement is 480 nm in forward rotation at both frequencies, an average of 12 nm per pulse, and 520 nm in reverse rotation, an average of 13 nm per pulse.
Adjusting the angle of a mirror holder
- Resolution in the nanometre range
- Holds its position with no power applied
- Angular range of ±3.5°, roughly ±61 mrad
- Adjustment down to 1.6 µrad, over 70,000 steps
Installation and precautions
- A high voltage is applied to the motor during operation. Use only the specified controllers, PAMC-104 or PAMC-204.
- Turn off the controller before connecting or disconnecting any cable.
- Do not disassemble or modify the motor or the controller.
- Do not use the motor near flammable materials or in damp or humid locations.
- If you notice an unusual smell, noise or heat, turn the controller off and investigate.
- Do not switch on the controller after it has been dropped or subjected to impact.
- Do not touch the motor while it is running, as a high voltage is present.
- If the motor reaches the end of the thread, you can reposition it by hand with the adjustment knob.
- The motor is an open loop device. If you need absolute position, add an external sensor and close the loop yourself.
- The motor produces a high pitched noise while running.
- Move the knob from one end to the other from time to time to redistribute the grease. If the motor has been unused for a long period the grease may harden, and turning the knob end to end usually frees it.
Controllers
Connecting a PAM3-6.5 or PAM6-13
PAMC-104
Download the control software →| Number of driving axes | 4 |
| Maximum driving frequency (Hz) | 1,500 |
| Interface | RS232C |
| Power supply voltage (V) | DC 24 |
| Dimensions (mm), excluding protrusions | 200 x 162 x 50 |
| Operating temperature | 0 to 40 ℃ |
| Storage temperature | 0 to 40 ℃ |
| Ambient humidity | 10 to 80 %RH, no condensation |
| Weight (kg) | 1.2 |
| Price (yen) | 132,000 |
| User manual | Download |
| 3D model | Download STEP |
What is in the box
| PAMC-104 | Part number | Quantity |
|---|---|---|
| Body | PAMC-104 | 1 |
| Software installation CD | PAM-SOFT-231213-001 | 1 |
| User manual | PAM-DOC-MAN-231213-001 | 1 |
| Communication cable | PAM-CA-USB-DSUB9-1 | 1 |
| Power adapter (sold separately) | UNI345-2419-PL03B | 1 |
PAM-RC100 (sold separately)
| Driving frequency (Hz) | 1,500 |
| Switchable channels | 4 |
| Interface | RS232C |
| Dimensions (mm), excluding protrusions | 102 x 78 x 30 |
| Operating temperature | 0 to 40 ℃ |
| Storage temperature | 0 to 40 ℃ |
| Ambient humidity | 10 to 80 %RH, no condensation |
| Weight (kg) | 0.32 |
| Price (yen) | 55,000 |
| User manual | Download |
| PAM-RC100 | Part number | Quantity |
|---|---|---|
| Body | PAM-RC100 | 1 |
| Cable | PAM-CA-DSUB9-DSUB9-2 | 1 |
PAMC-204 (USB and RS485)
Download the control software →| Maximum drive frequency (Hz) | 1,500 |
| Number of control axes | 4 |
| Output voltage | 70 to 150 V, adjustable by command |
| Interface | USB and RS485 |
| Power supply voltage (V) | DC 24 |
| Current consumption (A) | 0.5 or more |
| Dimensions (mm), excluding protrusions | 148.3 x 91.7 x 26.8 |
| Operating temperature | 5 to 40 ℃ |
| Storage temperature | 5 to 40 ℃ |
| Ambient humidity | 10 to 80 %RH, no condensation |
| Weight (kg) | 0.35 |
| Price (yen) | 176,000 |
| User manual | Download |
| 3D model | 3D model (STEP) → |
Nanometre level alignment
Turn a manual stage into a nanometre positioning stage
Replace the micrometer head with a Piezo Assist Motor and the stage gains a resolution below 30 nm, holds its position without power, and can be controlled electrically instead of by hand.
- Automate your equipment easily
- Reach nanometre precision without redesigning your setup
- Hold the adjusted position with no power applied
- Swap directly for a micrometer head
- Read the amount of movement by adding an external sensor
Three axis manual stage fitted with Piezo Assist Motors
For micromanipulators, scanning microscopes and high resolution microscopes.
Two axis mirror mounter fitted with Piezo Assist Motors
For building interferometers, laser positioning and laser welding.
Downloads
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Piezo Assist Motor pamphlet, version 4
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MTPAM-TSD-402SR, XY axis stage
MTPAM-TSD-602SR, XY axis stage
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MTPAM-TSD-603, Z axis stage
MTPAM-LMHB-30M mirror mounter
MTPAM-MHG-MP30-NL mirror mounter
PAMC-104 and PAM-RC100 controllers
PAMC-204 and PAMC-204-RJ controllers
PAMC-204 software
Download from GitHub →
Autocollimator alignment demo
Download the Python demo →Questions about the Piezo Assist Motor?
Tell us the travel, load and resolution you need and we will recommend a model and controller, or quote for a custom version.
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