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Piezo Assist Stage
What is the Piezo Assist Stage?
The Piezo Assist Stage is a manual stage with a fine positioning resolution of 20 nanometers and a coarse positioning range of several millimeters, up to 13 millimeters. It is used mainly to position a table or a jig, and to control very small loads precisely in applications such as nano indentation. The stage is compact and easy to use.
Explanatory material (PDF) →
“Piezo Assist” and “PiezoAssist” are registered trademarks of Mechano Transformer Corporation.
Piezo Assist Stage models
| Model name | Table size | Coarse movement | Fine movement | Fine movement, minimum resolution | Micrometer position | Price (yen) |
|---|---|---|---|---|---|---|
| MTPA-2251SPA | 25×25 mm | ±3 mm | 25 µm and above | Below 20 nm | Side | 79,650 |
| MTPA-2251SRPA | 25×25 mm | ±3 mm | 25 µm and above | Below 20 nm | Side | 79,650 |
| MTPA-2251SRZPA | 25×25 mm | ±3 mm | 25 µm and above | Below 20 nm | Side | 79,650 |
| MTPA-2251SZPA | 25×25 mm | ±3 mm | 25 µm and above | Below 20 nm | Side | 79,650 |
| MTPA-2401SPA | 40×40 mm | ±6.5 mm | 30 µm and above | Below 20 nm | Side | 80,240 |
| MTPA-2401SRPA | 40×40 mm | ±6.5 mm | 30 µm and above | Below 20 nm | Side | 80,240 |
| MTPA-2401SRZPA | 40×40 mm | ±6.5 mm | 30 µm and above | Below 20 nm | Side | 80,240 |
| MTPA-2401SZPA | 40×40 mm | ±6.5 mm | 30 µm and above | Below 20 nm | Side | 80,240 |
| MTPA-2601SPA | 60×60 mm | ±6.5 mm | 30 µm and above | Below 20 nm | Side | 82,600 |
| MTPA-2601SRPA | 60×60 mm | ±6.5 mm | 30 µm and above | Below 20 nm | Side | 82,600 |
| MTPA-2601SRZPA | 60×60 mm | ±6.5 mm | 30 µm and above | Below 20 nm | Side | 82,600 |
| MTPA-2601SZPA | 60×60 mm | ±6.5 mm | 30 µm and above | Below 20 nm | Side | 82,600 |
Piezo Assist Stage Controller
| Model name | Model type | Control axis | Power supply and voltage | Price (yen) |
|---|---|---|---|---|
| MTSD2001 | Piezo Assist Stage Controller | 1 axis | DC6V 0.8A | 53,100 |
| MTSD2003 | Piezo Assist Stage Controller | 3 axis | DC6V 1.8A | 106,200 |
| SPU15-102 | Adapter | — | DC6V 2.0A | 4,720 |
Operating principles
Equipment configuration
On both the X axis and the Y axis, the Piezo Assist Stage uses a micrometer as the coarse adjustment mechanism and the Piezo Assist mechanism as the fine adjustment mechanism. The fine adjustment mechanism handles precise positioning and precise force control, both of which come from the extension and contraction of the piezoelectric actuator. The coarse adjustment mechanism gives 13 mm of linear travel at a resolution of 10 micrometers. The fine adjustment mechanism gives 35 micrometers of travel at a resolution of 20 nanometers, so positioning at the nanometer level is possible.
Positioning with the coarse adjustment mechanism
Coarse positioning is carried out by turning the micrometer knob.
Positioning with the fine adjustment mechanism
Fine positioning works through the extension and contraction of the piezo actuator. When voltage is applied, the actuator extends or contracts in proportion to that voltage, so controlling the voltage gives positioning at the nanometer level.
Table sizes
Table size 25×25 mm
Table size 40×40 mm
Table size 60×60 mm
Applications
PID control and positioning
A displacement sensor fitted to the Piezo Assist Stage gives stable, high-precision positioning control with no drift and no hysteresis.
Piezo Assist Stage Controller (MTSD2001 and MTSD2003)
Dimensions (mm)
Specifications
| Product name | MTSD2001 | MTSD2003 | Adapter (SPU15-102) |
|---|---|---|---|
| Control axis | 1 axis | 3 axis | — |
| Power supply and voltage | DC6V 0.8A | DC6V 1.8A | DC6V 2.0A |
| Compatible AC adapter | SPU15-102 | SPU15-102 | — |
| Operating temperature | 5 to 40°C | 5 to 40°C | 5 to 40°C |
| Storage temperature | -20 to 60°C | -20 to 60°C | -20 to 60°C |
| Relative humidity | 20 to 80% RH (no condensation) | 20 to 80% RH (no condensation) | 20 to 80% RH (no condensation) |
| Dimensions (excluding protrusions) | 80×80×25 mm | 160×80×25 mm | 60×43.5×40.2 mm |
| Safety | — | — | IEC 62368-1 Edition 2.0, CoC V5 (Tier2) |
| Weight | 0.12 kg | 0.28 kg | 0.17 kg |
| Price | ¥53,100 | ¥106,200 | ¥4,720 |